Laboratory of Superconducting Devices for Signal Detection and Processing

Virtual visit

(picture archive)

The corner #1

One of the corners of the lab (room 312)

 



Clean room of class "1000"

 

High-vacuum plants for thin-film deposition "Leybold L-560 UV"

Mask aligner "Karl Suss MA150"

 


 
 


 

Plasma etching system "March Jupiter II"

 



Polishing machine "Allied TechPrep 8"



High-vacuum plants for thin-film deposition "Leybold A-700"

 



High-vacuum plants for thin-film deposition "Leybold Z-400"



 Plasma etching system "Secon XPE II"

 



Work place



 Mask aligner "Karl Suss KSM MJB 3 HP"

 



Programmed dicing saw M1006

 


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