На уровень вверх |
Ilin A.S., Cohn I.A., Vystavkin A.N., Kovalenko A.G. Thin film ruthenium microstructures for transition edge sensors. Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016 , 2016 , 10224. 102240S. ISSN 0277-786X