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Martyanov A.K., Sedov, V.S., Popovich A.F., Savin, S.S., Khomich A.A., Ralchenko, V.G., Konov V.I. Electrical conductivity of silicon carbide-diamond composite films produced by microwave plasma chemical vapor deposition in methane-silane-hydrogen mixtures. ПРИКЛАДНАЯ ФИЗИКА , 2020 (5). С. 73-79. ISSN 1996-0948