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Tsvetkov M.Yu., Yusupov V.I., Minaev N.V., Akovantseva A.A., Timashev P.S., Golant K.M., Chichkov B.N., Bagratashvili V.N. On the mechanisms of single-pulse laser-induced backside wet etching. Optics & Laser Technology , 2017 , 88. С. 17-23. ISSN 00303992