![]() | На уровень вверх |
Zvonkov B. N., Vikhrova O. V., Danilov Yu. A., Dorokhin M. V., Demina P. B., Drozdov M. N., Zdoroveyshchev A. V., Kriukov R. N., Nezhdanov A. V., Antonov I. N., Plankina S. M., Temiryazeva M. P. Formation of Carbon Layers by the Thermal Decomposition of Carbon Tetrachloride in a Reactor for MOCVD Epitaxy. Semiconductors , 2020 , 54 (8). С. 956-960. ISSN 1063-7826