 | На уровень вверх |
Kharkov Maksim M., Lomonosov G.S., Kolodko D.V., Kukushkina M.S., Kaziev A.V., Tumarkin A.V., Ogorodnikova O.V. MAGNETRON SPUTTER DEPOSITION OF TUNGSTEN COATINGS IN DEUTERIUM-HELIUM MIXTURES. High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes , 2023 , 27 (4). С. 25-32. ISSN 1093-3611
Kaziev A.V., Kolodko D.V., Tumarkin A.V., Lisenkov Vladislav Yu. SIMULATION OF TARGET SURFACE CHEMICAL STATE IN A HOT-TARGET HIPIMS PROCESS. ChemChemTech , 2023 , 66 (12). С. 76-81. ISSN 05792991
Kolodko D.V., Ageychenkov D.G., Kaziev A.V., Leonova K.A., Kharkov M.M., Tumarkin A.V. Diagnostics of ion fluxes in low-temperature laboratory and industrial plasmas. Journal of Instrumentation , 2019 , 14 (10). P10005-P10005. ISSN 1748-0221
Kaziev A.V., Kolodko D.V., Ageychenkov D.G., Tumarkin A.V., Kharkov M.M., Stepanova T.V. Direct ion content measurements in a non-sputtering magnetron discharge. Journal of Instrumentation , 2019 , 14 (09). C09004-C09004. ISSN 1748-0221
Tumarkin A.V., Kaziev A.V., Leonova K.A., Kharkov M.M., Kolodko D.V., Khomyakov A.Yu. Langmuir probe diagnostics of an impulse magnetron discharge with hot Cr target. Journal of Instrumentation , 2019 , 14 (09). C09026-C09026. ISSN 1748-0221
Kaziev A.V., Tumarkin A.V., Leonova K.A., Kolodko D.V., Kharkov M.M., Ageychenkov D.G. Discharge parameters and plasma characterization in a dc magnetron with liquid Cu target. Vacuum , 2018 , 153. С. 23-24. ISSN 0042207X
Kolodko D.V., Kaziev A.V., Ageychenkov D.G., Meshcheryakova E.A., Pisarev A.A., Tumarkin A.V. Mass spectroscopy of the ion flux produced during inductively coupled plasma nitriding process. Journal of Physics: Conference Series , 2017 , 830 (1). ISSN 1742-6596
