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Fominsky Mikhail Yu., Filippenko Lyudmila V., Chekushkin Artem M., Dmitriev Pavel N., Koshelets Valery P. Fabrication of Superconducting Nb–AlN–NbN Tunnel Junctions Using Electron-Beam Lithography. Electronics , 2021 , 10 (23). р. 2944. ISSN 2079-9292