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Chekushkin Artem M., Filippenko Lyudmila V., Kashin Vadim V., Fominskiy Mikhail Yu., Koshelets Valery P. Investigation of thin films for fabrication of Nb/AlN/NbN tunnel junctions and microstrip lines of NbTiN-SiO2-Al. Radioelectronics. Nanosystems. Information Technologies. , 2021 , 13 (4). С. 419-426. ISSN 22183000