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Luzanov V. A., Vedeneev A. S., Ryl’kov V. V., Temiryazeva M. P., Kozlov A. M., Dukhnovskii M. P., Bugaev A. S. Synthesis of thin tantalum films by magnetron sputtering. Journal of Communications Technology and Electronics , 2015 , 60 (12). С. 1325-1327. ISSN 1064-2269