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Ieshkin A.E., Kireev D.S., Ermakov Yu.A., Trifonov Artem /A.S., Presnov Denis /D.E, Garchev A.V., Anufriev Yu.V., Prokhorova I.G., Krupenin V.A., Chernish V.S. The quantitive analisys of silicon carbide surface smoothing by Ar and Xe claster ions. Nuclear Instruments and Methods in Physics Research, Section B, Beam Interactions with Materials and Amoms , 2018 , 421. С. 27-31. ISSN 0168-9002