Ketov Sergey /S.V., Joksimovic Rastko /R., Xie Guoqiang /G., Trifonov Artem /A.S., Kurihara Kazue /K., Louzguine-Luzgin Dmitri /D.V. Formation of nanostructured metallic glass thin films upon sputtering. Heliyon , 2017 , 3 (1). С. 1-16. ISSN 2405-8440
Полный текст не доступен из этого репозитория.Аннотация
Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.
| Тип объекта: | Статья |
|---|---|
| Авторы на русском. ОБЯЗАТЕЛЬНО ДЛЯ АНГЛОЯЗЫЧНЫХ ПУБЛИКАЦИЙ!: | Кетов С.В., Джоксимович Р., Хи Г., Трифонов А., Курихара К., Лузгин-Лузгин Д.В. |
| Подразделения (можно выбрать несколько, удерживая Ctrl): | 193 лаб. физических свойств нанокомпозитных материалов для информационных технологий |
| URI: | http://cplire.ru:8080/id/eprint/3991 |
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